COMSOL MEMS TUTORIAL PDF

The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical. Study the effect of thermal stress on resonant frequency. • Eigen Frequency Analysis with & without thermal stresses. • Change design to minimize the effect of.

Author: Visho Moogut
Country: Haiti
Language: English (Spanish)
Genre: Life
Published (Last): 1 July 2012
Pages: 293
PDF File Size: 18.3 Mb
ePub File Size: 17.26 Mb
ISBN: 594-9-64196-386-7
Downloads: 51251
Price: Free* [*Free Regsitration Required]
Uploader: Kajiran

It is typically quite small, and arrays This model shows how to analyze a tuning fork based piezoelectric rate gyroscope.

Inspired by work done by V. Electrostatic forces scale favorably as the device dimensions are reduced, a fact frequently leveraged in MEMS. Mens can extend the material models with thermal expansion, damping, and initial stress and strain features.

You can fix this by pressing ‘F12’ on your keyboard, Selecting ‘Document Mode’ and choosing ‘standards’ or the latest version listed if standards is not an option. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions. This model simulates the mechanism of a valveless micropump, that is designed to be effective at low Reynolds numbers, overcoming hydrodynamic Design engineers can easily create models of common devices such as actuators, sensors, oscillators, filters, ultra sonic transducers, BioMEMS, and much more.

Surface Acoustic Wave Gas Sensor. The resonator is anchored to the substrate by a polysilicon post and power is transmitted to the substrate through the post.

Its amplitude decays rapidly, often exponentially, through the depth of the material. Squeeze-Film Gas Damping of a Vibrating Disc This benchmark model computes the total force acting on a vibrating disc in the frequency and time domains and compares both results with expressions derived analytically. One method of ccomsol spring-like structures or inducing curvature in thin structures is to plate them to substrates that are under the influence of residual stresses.

  CHARLES LAMB THE SUPERANNUATED MAN PDF

Popularity Popularity Date Published. Gyroscopes Magnetostrictive devices Resonators Piezoelectric devices Piezoresistive devices. Deformation depends on the ambient pressure and temperature, on the materials used, and on any initial stresses in the material.

Modeling MEMS Devices with COMSOL Multiphysics®

Disc Resonator Anchor Losses This model shows how to compute the anchor loss limited quality factor of a diamond disc resonator. It illustrates how fluid flow can deform solid structures and how to solve for the flow in a continuously deforming geometry.

Prestressed Micromirror One method of creating spring-like structures or inducing curvature in thin structures is to plate them to substrates that are under the influence of residual stresses. The model performs a static analysis on tutoeial piezoelectric actuator based on the movement of a cantilever beam, using the Piezoelectric Devices predefined multiphysics interface.

The system applies an AC potential on the electrode surfaces of both This model shows how to model a This 2D axisymmetry model uses a parametric sweep of voltage to SAW devices typically apply electrodes to a piezoelectric Piezoelectric valves are frequently employed in medical and laboratory applications due to their fast response times and quiet operation.

When and Where

Gecko Foot In nature, geckos use dry adhesion forces to climb walls. These interfaces can be used to model squeeze film and slide film damping across a wide range of pressures rarefaction effects can be included. This example explores the shift in natural frequencies caused by changing the temperature. A surface acoustic wave SAW is an acoustic wave propagating along the surface of a solid material. This model shows the bending of a cantilever beam under an applied electrostatic load.

  LUDOVICO EINAUDI DIETRO CASA SHEET MUSIC PDF

This example shows how to set up a piezoelectric transducer problem following the work of Y.

MEMS and Piezoelectric Device Models

Piezoresistive pressure sensors were some of the first MEMS devices to be commercialized. The temperature within a displaced, Joule-heated thermal actuator is shown at the top while the visualization at the bottom shows the current density distribution. Thickness Shear Mode Quartz Oscillator. One cosol investigates a doubly clamped beam where both ends are fixed, while the other study looks at a cantilever beam where only one end is fixed. A third layer, the A pressure sensor gives the pressure based on capacitance change, which is related to the deformation of the structure.

The MEMS Module includes analyses in the stationary and transient domains, as well as comspl eigenfrequency, parametric, quasi-static, and frequency response analyses. COMSOL offers the flexibility to evaluate a wide range of physical quantities, including predefined quantities like temperature, electric field, or stress tensor available through tutroial menusas well as arbitrary user-defined expressions.

AT cut crystals vibrate in the thickness The design and modeling of microelectromechanical systems MEMS is a unique engineering discipline. The solvers are set up automatically with default settings, which are already tuned for each specific interface.